Sensors (Basel, Switzerland)
A Detection Method for Seeding Temperature in Czochralski Silicon Crystal Growth Based on Multi-Sensor Data Fusion.
Lei Jiang, Tongda Chang, Ding Liu
Published: 202610.3390/s26020516
Abstract
The Czochralski method is the dominant technique for producing power-electronics-grade silicon crystals. At the beginning of the seeding stage, an excessively high (or low) temperature at the solid-liquid interface can cause the time required for the…
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