Micromachines
Ligand Functionality-Dependent Performance of Organotin Carboxylate Resists.
Xiaofei Liu, Tianren Liu, Kaixin Su, Jingxin Lei, Yuanfu Chen, Yuan Chen, Dongxu Yang
Published: 202510.3390/mi17010001
Abstract
As metal-containing resists attract increasing research interest in high-resolution lithography, gaining insights into the photochemical mechanisms, particularly in relation to the ligand functionality, is actively demanded. In this work, a controlle…
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