High-Precision Optical Angle Detection Method for Two-Dimensional MEMS Mirrors.

As a core component of MEMS LiDAR, the 2D MEMS mirror, with high-precision optical angle detection, is a key technology for radar scanning and imaging. Existing piezoresistive detection schemes of mirrors suffer from high fabrication complexity, high temperature sensitivity, and a limited accuracy of only 0.08°, failing to meet the requirements for vehicular and airborne scanning applications. This study focuses on a two-dimensional electromagnetic MEMS mirror. Based on the reflection principles of geometric optics, angle detection schemes with photodiode (PD) arrays are analyzed. A novel four-quadrant optical measurement sensor featuring a 16-PD array is proposed. This design replaces conventional large-area PDs with a compact PD array, effectively mitigating nonlinearity and low accuracy issues caused by oversized PD trenches and edge dimensions. High-precision detection of the mirror's deflection angle is achieved by measuring the current variations induced by the reflected spot position on the PDs in each quadrant. The experimental results demonstrate that the 16-PD array optical angle sensor achieves an accuracy between 0.03° and 0.036° over a detection range of ±8°.