Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries.

This study focuses on the pre-treatment cleaning technology for the polyimide (PI) substrate of flexible nine-in-one microsensors. The environmentally friendly cleaning agent B, developed by Sea Energe, was innovatively used to replace traditional organic solutions (acetone, methanol, and isopropyl alcohol) to verify its feasibility and application potential in Micro-Electro-Mechanical Systems (MEMS) processes. Cleaning agent B, developed by Sea Energe, was used for the first time to clean the PI substrate of flexible nine-in-one microsensors, and the flexible nine-in-one microsensor was used as a verification platform to compare the cleaning performance with traditional organic solutions (acetone, methanol, and isopropyl alcohol). The experimental results proved that cleaning agent B developed by Sea Energe effectively removed contamination from the PI substrate surface while avoiding the environmental impact and process compatibility issues associated with traditional organic solvents. To verify its reliability, the developed flexible nine-in-one microsensor was embedded in the hydrogen end flow channel of a hydrogen/vanadium redox flow battery (HVRFB) to perform real-time monitoring of multiple parameters, including hydrogen concentration, voltage, current, conductivity, temperature, humidity, flow, pressure, and pH. The experimental results proved that using cleaning agent B, developed by Sea Energe, to clean the PI substrate and the subsequent flexible nine-in-one microsensor resulted in comparable operational stability and measurement accuracy to traditional organic solution (acetone, methanol, and isopropyl alcohol) cleaning processes. This experimental result verifies that cleaning agent B, developed by Sea Energe, not only has an excellent cleaning effect, but also meets the requirements for highly reliable microsensor development, potentially offering an alternative solution for the future introduction of green processes into semiconductors, MEMSs, and various application fields.