Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces.

This work presents a novel approach to create and dynamically control quasi-bound states in the continuum (BIC) resonances through the hybridization of 1D and 2D metasurfaces using micro-electromechanical systems (MEMS). The quasi-BIC resonance's central wavelength and quality factor are precisely tuned by introducing out-of-plane symmetry breaking through a silicon MEMS membrane positioned above a 1D silicon metasurface. The proposed design achieves ultranarrow resonance linewidths with the spectral tuning range exceeding 60 nm while maintaining a constant quality factor. This tuning capability, realized through both horizontal displacement within a 1D metasurface and vertical MEMS membrane movement, offers a new degree of freedom for manipulating quasi-BIC resonances. The proposed hybridization of 2D and 1D metasurfaces using a MEMS mechanism provides a practical route to dynamic modulation of transmission resonance characteristics, making it a promising candidate for tunable filters, spectroscopy, imaging, and sensing applications.