Optics letters
Femtosecond laser conditioning to enhance the ultraviolet laser-induced damage resistance of HfO2 thin films.
Kaixin Yuan, Feng Geng, Yusi Wang, Yujie Liu, Yan Cheng, Han Wu, TingTing Zheng, Chenying Yang, Yueguang Zhang, Weidong Shen
Published: 202610.1364/OL.583479
Abstract
Hafnium oxide (HfO2) thin films are widely used in high-power laser coatings. However, enhancing their laser-induced damage resistance remains challenging, primarily due to intrinsic defects such as oxygen vacancies, which can lead to increased absor…
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