Optics letters
Ga2O3 MISM photodiode arrays with an HfO2 insulator achieving a 20 fA dark current for solar-blind imaging.
Dianmeng Dong, Xianmao Cao, Jingchen Wang, Qingyi Zhang, Min Peng, Zechuan Wang, Yao Li, Shulin Jiao, Han Ye, Fan Zhang, Yang Zhang, Zhenping Wu
Published: 202510.1364/OL.577415
Abstract
Traditional Ga2O3 metal-semiconductor-metal (MSM) photodetectors suffer from high dark current, limiting their sensitivity for deep ultraviolet (DUV) imaging. This Letter reports a novel, to the best of our knowledge, metal-insulator-semiconductor-me…
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