Optics letters
HiPIMS deposition method unlocks higher X-ray reflectance in ultra-short-period multilayer mirrors.
Corentin Nannini, Nolann Ravinet, Evgueni Meltchakov, Christian Gollwitzer, Thu Nhi Tran Caliste, Antoine Lejars, Franck Delmotte
Published: 202510.1364/OL.571400
Abstract
The efficiency of multilayer (ML) mirrors with ultra-short periods, essential for X-ray science and applications, remains severely limited by interface imperfections at sub-nanometric scale. We demonstrate a breakthrough in interface quality of ultra…
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