Optics express
Generation of anisotropic stress in borosilicate glass by excimer laser irradiation.
Andreas Röben, Jürgen Ihlemann
Published: 202510.1364/OE.576307
Abstract
Spatially homogeneous irradiation of borosilicate glass with an ArF excimer laser (193 nm) induces tensile stress by generating a stress bearing melt layer, deforming the substrate parabolically, analogous to a stress-bearing coating. Here, we show t…
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