Optics express
Fabrication of electroless nickel coated X-ray ellipsoidal mirrors with hybrid metrology method combining CGH and contact profilometer.
Pengfeng Sheng, Zhao Shi, Qiushi Huang, Jun Yu, Zhanshan Wang, Kun Wang
Published: 202510.1364/OE.574401
Abstract
Ellipsoidal mirrors are essential for high-performance X-ray focusing. A hybrid metrology method combining computer-generated hologram (CGH) interferometry and contact profilometry to enable accurate figure measurement and fabrication for ellipsoidal…
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