Optics express
In-situ characterization of high-power laser-induced thermal deformation of MEMS micromirrors in vacuum.
Hongfeng Zhao, Yi Yang, Wenli Xue, Jiaqi Huang, Yuqiang Hu, Yongquan Su, Yichen Liu, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu
Published: 202510.1364/OE.565600
Abstract
This work employed an integrated approach combining numerical simulations and experimental measurements. The systematic investigation focused on the thermal deformation characteristics of large optical aperture MEMS fast steering mirrors (FSM) under…
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