Science advances
Directed self-assembly of 3D interconnected networks.
Mingchao Ma, Guillermo A Hernández-Mendoza, Baopu Zhang, Zehao Sun, Alfredo Alexander-Katz, Caroline A Ross
Published: 202510.1126/sciadv.adz7432
Abstract
Directed self-assembly (DSA) of block copolymers (BCPs) has long been included in the semiconductor roadmap as a lithographic pathway to enable continued device scaling. Tremendous progress has been made in generating two-dimensional (2D) BCP pattern…
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