The Review of scientific instruments
Development of atomic-scale thin-film deposition system for perpendicular magnetic tunnel junctions with high tunneling magnetoresistance.
Siyuan Cheng, Houyi Cheng, Yuxuan Yao, Sylvain Eimer, Boyu Zhang, Xinhang Guo, Daoqian Zhu, Shiqi Wang, Yulong Qiu, Song Chen, Renyou Xu, Jiaxu Li, Yan Li, Jiemin Fang, Aiwen Chen
Published: 202510.1063/5.0273533
Abstract
The advancement of magnetic random access memory (MRAM) benefits from academic research on magnetic tunnel junctions (MTJs). However, deposition systems for academic research are often limited by atomic-scale control, process automation, and post-dep…
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