Scientific reports
Study of the process-structure-property correlation in CVD-SiC coatings on graphite substrates.
Yanli Huo, Shouwan Qin, Yufeng Chen, Taisheng Yang, Hailin Liu, Jiajia Ma, Bing Ai, Zetan Liu, Hailong Liang, Huaping Song
Published: 202510.1038/s41598-025-34258-y
Abstract
This study investigates the chemical vapor deposition (CVD) of SiC coatings on high-purity graphite susceptors, which serve as critical components in the epitaxial growth systems of III-V semiconductor materials (specifically GaN/SiC heterostructures…
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