Nature communications
A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.
Cheng Zeng, Yongshan Xu, Xinqi Wei, Jianing Liang, Zongdong Sun, Xiaoyu He, Gaofeng Du, Shuhao Wang, Yao Liu, Xing Zhou, Yuan Li, Kailang Liu, Ying Ma, Tianyou Zhai, Huiqiao Li
Published: 202610.1038/s41467-026-68593-z
Abstract
Lithography is pivotal in fabricating micro/nanoscale patterns and processing materials for electronic microdevices. However, conventional organic polymeric resists inevitably entail the use of various chemical solutions or solvents, which especially…
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