Oxidant-Dependent Conduction in Early-Cycle Atomic-Layer-Deposited Al2O3 and Its Impact on the Dielectric Behavior of Al2O3/TiO2 Nanolaminates.

Nanolaminates─atomically layered stacks of dissimilar oxides─are widely used to engineer dielectric behavior at the nanometer scale. Among these, atomic layer deposition (ALD)-grown Al2O3/TiO2 stacks have been reported to exhibit "giant" dielectric c…

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