ACS applied materials & interfaces
Nickel-Assisted Laser Oxidation of WSe2 Layered Films for Spatially Controlled WO3 Patterning Process toward Resistive Memory and Molecular Sensing.
Yu-Chieh Hsu, Ruei-Hong Cyu, Yu-Qi Huang, Chieh-Ting Chen, Po-Chien Lai, Yi-Jen Yu, Chang-Hong Shen, Yu-Lun Chueh
Published: 202510.1021/acsami.5c17500
Abstract
A novel approach to convert a 2D WSe2 film into a WOx film by the laser-induced oxidation process using a nickel (Ni) adsorption layer, namely Ni-assisted laser oxidation process, was demonstrated. A layer of Ni metal was deposited to absorb the heat…
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