ACS applied materials & interfaces
Sustainable Wafer-Scale Integration of Epitaxial ZnO on Silicon for Piezoelectric Devices.
David Sanchez-Fuentes, Abbes Rahal, Rudy Desgarceaux, Lorenzo García, Samir Bouisri, Sijie Ding, Nicolas Camara, Fabien Pascal, Ricardo García-Bermejo, Nicolas Guillaume, Gustavo Ardila, Jaume Gazquez, César Magén, Sergi Plana-Ruiz, Cathy Guasch
Published: 202510.1021/acsami.5c11133
Abstract
To sustainably support the ongoing energetic transition, we need metal oxides capable of converting energy and produce sensing devices. However, these materials suffer from a high economic cost of manufacturing, and their production in a sustainable…
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