Nano letters
Self-Heating of Top-Down Manufactured ITO Sensors for Accurately Monitoring ppb-Level O3.
Xiaohua Ji, Meng Li, Ruoqing Zhang, Ruofan Zhang, Lunzhen Hu, Zanhong Deng, Shimao Wang, Qingchuan Guo, Huadong Lu, Gang Meng
Published: 202610.1021/acs.nanolett.5c05216
Abstract
Wafer-scale fabrication of high-performance metal oxide semiconductor (MOS) gas sensors, with good reproductivity/uniformity, is essential for their batch deployments as either selective sensors or smart electronic noses, but it remains a big challen…
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