Micron (Oxford, England : 1993)
Monte Carlo simulation of secondary electron emission in TixNy based on first principle calculation.
Runqi Yan, Yonggui Zhai, Hongguang Wang, Yongdong Li, Meng Cao
Published: 202610.1016/j.micron.2026.103994
Abstract
This study develops a Monte Carlo simulation framework for secondary electron emission, leveraging first-principles-derived energy loss functions to model inelastic scattering processes. The simulation incorporates distinct energy-loss mechanisms ass…
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