Small (Weinheim an der Bergstrasse, Germany)
Regulation and Synthesis of Mixed-Ligand Titanium-Oxide Nanoparticles for 12 nm Nanolithography.
Shicui Xing, Dong Wang, Zhipeng Fan, Wenbing Kang, Qianqian Wang, Xu Wang
Published: 202510.1002/smll.202510779
Abstract
The rapid advancement of extreme UV lithography has intensified the demand for photoresist (PR) innovation, with organic-inorganic hybrid metal oxide photoresists (MORs) emerging as a promising next-generation platform. The design of organic ligands…
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