Luminescence : the journal of biological and chemical luminescenceSilicon DioxideArgonOxygenNanoparticlesParticle Size
The Effect of Argon:Oxygen Gas Mixture on DC-Sputtering Deposition Characterization of Synthesis SiO2 Nanoparticles.
Ruqia A H Hassan, Fuad T Ibrahim
Published: 202510.1002/bio.70332
Abstract
In this work, nanostructured silicon dioxide (SiO2) thin films were deposited on glass substrates using a DC reactive magnetron sputtering technique. A gaseous mixture of argon and oxygen at different mixing ratios was used to synthesize SiO2 nanopar…
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