Advanced science (Weinheim, Baden-Wurttemberg, Germany)
Wafer Scale III-Nitride Deep-Ultraviolet Vertical-Cavity Surface-Emitting Lasers Featuring Nanometer-Class Control of Cavity Length.
Chen Ji, Jiaming Wang, Fujun Xu, Lisheng Zhang, Jing Lang, Ziyao Zhang, Fuyun Tan, Chengzhi Ji, Junchuan Zhang, Erfei Zhang, Xiangning Kang, Zhixin Qin, Guangxu Ju, Jiejun Wu, Xuelin Yang
Published: 202510.1002/advs.202520405
Abstract
AlGaN-based deep-ultraviolet vertical-cavity surface-emitting lasers (DUV VCSELs) have shown a great application potential in optical atomic clocks, maskless photolithography, etc. Nevertheless, the uncontrolled cavity length-induced detuning issue,…
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