Advanced materials (Deerfield Beach, Fla.)
Femtosecond Laser Non-Diffracting-Beam Lithography via Phase Modulation for Dielectric Metasurface Fabrication.
Weina Han, Kailin Zhao, Donghui Wei, Qin Guo, Jintao Tong, Yansong Zhang, Jie Hu, Qian Cheng, Cong Wang, Changji Pan, Nai Lin, Lan Jiang
Published: 202610.1002/adma.202521635
Abstract
Dielectric phase-change metasurfaces enable programmable light control and show great application potential in optoelectronics. However, current technologies are limited by challenges in achieving high-uniformity, high-precision fabrication over larg…
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