Advanced materials (Deerfield Beach, Fla.)
Ultrathin Monatomic Antimony Films by Sacrificial Atomic Layer Deposition for Phase Change Memory.
Gwangsik Jeon, Sangmin Jeon, Seunghwan Lee, Jeong Woo Jeon, Wonho Choi, Byongwoo Park, Sungjin Kim, Chanyoung Yoo, Hyejin Jang, Cheol Seong Hwang
Published: 202510.1002/adma.202519924
Abstract
Antimony (Sb) is an intriguing material for advanced electronics, with thickness-dependent properties at the nanoscale offering new functionalities. However, conventional methods for depositing Sb thin films cannot produce continuous ultrathin films…
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